Document Metadata & Facility Classification
- Document ID:
SOP-ENV-2021-17(Rev 2.0) - Lead Specialist / Author: Kadeem Manning (Tier II Vacuum Technician)
- Facility Suite: Cleanroom Suite B-102 (ISO Class 6 Processing / ISO Class 7 Gowning)
- Compliance: ISO 14644-1 / EPA QAPP / ALCOA+ Data Integrity
- Official PDF: Download Cleanroom SOP PDF
1. Cleanroom Pressure & Classification Cascade
[Exterior Non-Controlled Hallway]
│
▼ (+10 Pa Delta)
[Airlock & Gowning Anteroom] (ISO Class 7 / Class 10,000)
│
▼ (+15 Pa Delta)
[Main Vacuum Deposition Bay] (ISO Class 6 / Class 1,000)2. Contamination Control Standards & Particle Limits
| Cleanroom Zone | ISO Classification | Max Allowed Particulates ($\ge 0.5\ \mu\text{m/m}^3$) | Temperature Range | Relative Humidity (RH) | Pressure Differential |
|---|---|---|---|---|---|
| Gowning Airlock | ISO Class 7 (Class 10,000) | $\le 352,000$ | $20.0^\circ\text{C} \pm 2.0^\circ\text{C}$ | $45% \pm 5%$ | $+10\text{ Pa}$ (rel. to hall) |
| Deposition Bay | ISO Class 6 (Class 1,000) | $\le 35,200$ | $20.5^\circ\text{C} \pm 1.0^\circ\text{C}$ | $45% \pm 3%$ | $+25\text{ Pa}$ (rel. to hall) |
| Metrology Hood | ISO Class 5 (Class 100) | $\le 3,520$ | $20.5^\circ\text{C} \pm 0.5^\circ\text{C}$ | $45% \pm 2%$ | Laminar Flow ($0.45\text{ m/s}$) |
3. Strict Material Ingress Protocol
- Pre-Wipe Disinfection: Prior to pass-through transfer, wipe all external chemical containers, tool handles, and wafer carriers with $99.9%$ electronic-grade Isopropanol (IPA) using low-particulate polyester cleanroom wipes.
- Prohibited Materials: Cardboard, wood-pulp paper, graphite pencils, cosmetics, food/beverage, and non-ESD static-generating plastics are $100%$ prohibited inside Suite B-102.
- Logbook Documentation: All personnel entries, tool transfers, and daily particle counts are recorded in synthetic polypropylene cleanroom notebooks per ALCOA+ protocols.