Document Metadata & Equipment Scope
- Document ID:
TS-CRYO-2022-012(Rev 2.0) - Author: Kadeem Manning (Tier II Facility Technician)
- Target Systems: Leybold COOLVAC 1500 / COOLPOWER Cold Heads & COOLPAK 2000i / 5000i Compressors
- Official PDF: Download Official Diagnostic Protocol PDF
1. Diagnostic Decision Tree for Pressure & Thermal Stalls
[Cryopump Stalls Above 15K on 2nd Stage]
│
┌──────────┴──────────┐
▼ ▼
[Cold Head Power Stalled] [Helium Mass 4 Signal High]
│ │
├─ Adsorber Saturated ├─ Check Aeroquip Coupling O-rings
└─ Low He Gas Charge └─ Displacer Dynamic Seal Leak
2. Root Cause & Fault Isolation Matrix
| Symptom / Observed Fault | Probable Root Cause | Diagnostic Verification Check | Corrective Action & Protocol |
|---|---|---|---|
| High Helium Background (Mass 4 Signal) | 1. Cold head displacer seal leak. 2. Aeroquip coupling poppet leaking into vessel. | Mass 4 signal increases directly when static helium pressure is raised from 16 to 18 bar(g) on COOLPAK compressor. | Overhaul cold head displacer drive and dynamic seals. Replace leaking Aeroquip flexline couplings. |
| Second Stage Fails to Reach $< 15\text{ K}$ | 1. Charcoal array saturated with hydrogen/neon. 2. High radiative thermal load. | Perform pressure rise rate test ($dP/dt$) with gate valve closed. If rate $> 1.0 \times 10^{-3}\text{ mbar}\cdot\text{L/s}$, thermal load is excessive. | Execute full thermal regeneration with dry $N_2$ purge at $65^\circ\text{C}$ for 4 hours. |
| Relief Valve Continuous Venting | 1. Particulate debris on Viton seal seat. 2. Weakened ISO 4126 relief spring. | Inspect exhaust line with acoustic ultrasonic probe and leak detector sniffer. | Vent cryopump safely to ambient atmospheric pressure; clean valve seat and replace spring assembly. |
3. Standard Cool-Down & Regeneration Verification
Temperature (Kelvin)
300K ──┐
│ (1st Stage Cool-down: ~65K in 45 min)
80K ──┼───────────┐
│ │ (2nd Stage Cool-down: <12K in 75 min)
15K ──┼───────────┼───────────┐ (Operational Base: ~10K)
0K ──┴───────────┴───────────┴────── Time (Minutes)
- Roughing Cross-Over: Never open cryopump gate valve to chamber until roughing pressure is $< 5.0 \times 10^{-2}\text{ mbar}$ to avoid oil backstreaming and rapid cryo-array icing.
- Purge Regeneration: Backfill with ultra-high purity dry Nitrogen ($99.999%$) heated to $65^\circ\text{C}$ to release condensed water, hydrocarbons, and cryogenic gases.